Very narrow band injection seeded f2 lithography laser
A Standard patent application filed on 19 September 2000 credited to Ershov, Alexander I. ; Onkels, Eckehard D. ; Hofmann, Thomas ; Partlo, William N ; Das, Palash P

Details

Application number :

78301  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Very narrow band injection seeded f2 lithography laser  

Inventor :

Ershov, Alexander I. ; Onkels, Eckehard D. ; Hofmann, Thomas ; Partlo, William N ; Das, Palash P  

Agent name :

 

Address for service :

 

Filing date :

19 September 2000  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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