Details
- Application number :
- 32308
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Semiconductor device fabrication method and semiconductor device fabrication device
- Inventor :
- Ishizu, Akio
;
Takashima, Kazutoshi
;
Oba, Shiro
;
Kobayashi, Yoshihiko
;
Kakegawa, Yuji
;
Haga, Shigeru
;
Takada, Susumu
;
Koujiro, Iwamichi
;
Arai, Norinaga
;
Ida, Tsutomu
- Agent name :
-
- Address for service :
-
- Filing date :
- 15 February 2001
- Associated companies :
-
- Applicant name :
- Hitachi Limited
- Applicant address :
-
- Old name :
-
- Original Source :
- Go