Details
- Application number :
- 11108
- Application type :
- Standard
- Application status :
- SEALED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Discharge plasma generating method, discharge plasma generating apparatus, semiconductor device fabrication method, and semiconductor device fabrication apparatus
- Inventor :
- Yamakoshi, Hideo
;
Satake, Koji
;
Murata, Masayoshi
;
Mashima, Hiroshi
;
Aoi, Tatsufumi
;
Takeuchi, Yoshiaki
- Agent name :
- Davies Collison Cave
- Address for service :
- Level 15 1 Nicholson Street MELBOURNE VIC 3000
- Filing date :
- 09 January 2001
- Associated companies :
-
- Applicant name :
- Mitsubishi Heavy Industries Limited
- Applicant address :
- 5-1 Marunouchi 2-chome Chiyoda-ku Tokyo Japan
- Old name :
-
- Original Source :
- Go