Apparatus for a laser writer for complex microlithographic patterns with a delaycircuit
A Standard patent application filed on 13 October 1998 credited to Odselius, Leif ; Sandstrom, Torbjorn

Details

Application number :
96570  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Apparatus for a laser writer for complex microlithographic patterns with a delaycircuit  
Inventor :
Odselius, Leif ; Sandstrom, Torbjorn  
Agent name :
 
Address for service :
 
Filing date :
13 October 1998  
Associated companies :
 
Applicant name :
Micronic Laser Systems AB  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor