Beam positioning in microlithographic writing
A Standard patent application filed on 17 November 2000 credited to Sandstrom, Torbjorn ; Odselius, Leif ; Andersson, Ingvar ; Gullstrand, Stefan ; Israelsson, Mattias ; Ekberg, Peter

Details

Application number :

15658  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Beam positioning in microlithographic writing  

Inventor :

Sandstrom, Torbjorn ; Odselius, Leif ; Andersson, Ingvar ; Gullstrand, Stefan ; Israelsson, Mattias ; Ekberg, Peter  

Agent name :

 

Address for service :

 

Filing date :

17 November 2000  

Associated companies :

 

Applicant name :

Micronic Laser Systems AB  

Applicant address :

 

Old name :

 

Original Source :

Go