Narrow band excimer laser with gas additive
A Standard patent application filed on 25 September 1998 credited to Hofmann, Thomas ; Ershov, Alexander I. ; Das, Palash P ; Ishihara, Toshihiko

Details

Application number :

95110  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Narrow band excimer laser with gas additive  

Inventor :

Hofmann, Thomas ; Ershov, Alexander I. ; Das, Palash P ; Ishihara, Toshihiko  

Agent name :

 

Address for service :

 

Filing date :

25 September 1998  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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Same Inventor

• Narrow band excimer laser