Narrow band excimer laser
A Standard patent application filed on 21 August 1998 credited to Ishihara, Toshihiko ; Ershov, Alexander I. ; Das, Palash P ; Hofmann, Thomas

Details

Application number :

91131  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Narrow band excimer laser  

Inventor :

Ishihara, Toshihiko ; Ershov, Alexander I. ; Das, Palash P ; Hofmann, Thomas  

Agent name :

 

Address for service :

 

Filing date :

21 August 1998  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

Go  

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