Details
- Application number :
- 2002355502
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Stage system, exposure device, and method of manufacturing device
- Inventor :
- Nishi, Kenji
- Agent name :
-
- Address for service :
-
- Filing date :
- 29 July 2002
- Associated companies :
-
- Applicant name :
- NIKON CORPORATION
- Applicant address :
- 2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331
- Old name :
-
- Original Source :
- Go