Laser chamber with fully integrated electrode feedthrough main insulator
A Standard patent application filed on 17 August 2000 credited to Partlo, William N ; Webb, R. Kyle

Details

Application number :

69142  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Laser chamber with fully integrated electrode feedthrough main insulator  

Inventor :

Partlo, William N ; Webb, R. Kyle  

Agent name :

 

Address for service :

 

Filing date :

17 August 2000  

Associated companies :

 

Applicant name :

Cymer, Inc.  

Applicant address :

 

Old name :

 

Original Source :

Go