Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device
A Standard patent application filed on 22 June 1998 credited to Tanaka, Keiichi

Details

Application number :
80370  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device  
Inventor :
Tanaka, Keiichi  
Agent name :
 
Address for service :
 
Filing date :
22 June 1998  
Associated companies :
 
Applicant name :
Nikon Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor