Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method
A Standard patent application filed on 02 February 2000 credited to Tanaka, Keiichi

Details

Application number :
23242  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method  
Inventor :
Tanaka, Keiichi  
Agent name :
 
Address for service :
 
Filing date :
02 February 2000  
Associated companies :
 
Applicant name :
Nikon Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor