Sensor and method for sensing the position of the surface of object, aligner provided with the sensor and method of manufacturing the aligner, and method of manufacturing devices by using the aligner
A Standard patent application filed on 09 June 1998 credited to Mizutani, Hideo

Details

Application number :
75522  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Sensor and method for sensing the position of the surface of object, aligner provided with the sensor and method of manufacturing the aligner, and method of manufacturing devices by using the aligner  
Inventor :
Mizutani, Hideo  
Agent name :
 
Address for service :
 
Filing date :
09 June 1998  
Associated companies :
 
Applicant name :
Nikon Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor