Surface position detection apparatus, exposure method, and device porducing method
A Standard patent application filed on 09 December 2003 credited to Mizutani, Hideo ; Hidaka, Yasuhiro ; Owa, Soichi ; Magome, Nobutaka

Details

Application number :

2003289272  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Surface position detection apparatus, exposure method, and device porducing method  

Inventor :

Mizutani, Hideo ; Hidaka, Yasuhiro ; Owa, Soichi ; Magome, Nobutaka  

Agent name :

 

Address for service :

 

Filing date :

09 December 2003  

Associated companies :

 

Applicant name :

NIKON CORPORATION  

Applicant address :

2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331  

Old name :

 

Original Source :

Go