Aligner, exposure method using the aligner, and method of manufacture of circuitdevice

Application number :: 68535
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Aligner, exposure method using the aligner, and method of manufacture of circuitdevice
Inventor :: Kiuchi, Toru ; Nishi, Kenji
Agent name :
Address for service :
Filing date :: 17 April 1998
Associated companies :
Applicant name :: Nikon Corporation
Applicant address :
Old name :
Original Source :: Go

Aligner, exposure method using the aligner, and method of manufacture of circuitdevice A Standard patent application filed on 17 April 1998 credited to Kiuchi, Toru ; Nishi, Kenji