Data-conversion method for a multibeam laser writer for very complex microlithographic patterns
A Standard patent application filed on 26 February 1998 credited to Thuren, Anders

Details

Application number :
66423  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Data-conversion method for a multibeam laser writer for very complex microlithographic patterns  
Inventor :
Thuren, Anders  
Agent name :
 
Address for service :
 
Filing date :
26 February 1998  
Associated companies :
 
Applicant name :
Micronic Laser Systems AB  
Applicant address :
 
Old name :
 
Original Source :
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Same Inventor