Details

Application number :
45072  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Variable high temperature chuck for high density plasma chemical vapor deposition  
Inventor :
Mcmillin, Brian ; Nguyen, Huong ; Berney, Butch ; Barnes, Michael  
Agent name :
 
Address for service :
 
Filing date :
30 September 1997  
Associated companies :
 
Applicant name :
Lam Research Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor