Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support
A Standard patent application filed on 02 June 1997 credited to Benjamin, Neil ; Mangano, Stefano ; Hylbert, Jon

Details

Application number :

32165  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support  

Inventor :

Benjamin, Neil ; Mangano, Stefano ; Hylbert, Jon  

Agent name :

 

Address for service :

 

Filing date :

02 June 1997  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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