Details

Application number :
32164  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
High flown vacuum chamber including equipment modules such as plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support  
Inventor :
Benjamin, Neil ; Mangano, Stefano ; Hylbert, Jon  
Agent name :
 
Address for service :
 
Filing date :
02 June 1997  
Associated companies :
 
Applicant name :
Lam Research Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor