An apparatus for generation of a linear arc discharge for plasma processing
A Standard patent application filed on 20 October 1995 credited to Barankova, Hana
;
Bardos, Ladislav
Details
Application number :
39420
Application type :
Standard
Application status :
CEASED
Under opposition :
No
Proceeding type :
Invention title :
An apparatus for generation of a linear arc discharge for plasma processing