A method and an apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation of the electrode
A Standard patent application filed on 12 October 1994 credited to Bardos, Ladislav ; Berg, Soren ; Barankova, Hana

Details

Application number :

80077  

Application type :

Standard  

Application status :

CEASED  

Under opposition :

No  

Proceeding type :

 

Invention title :

A method and an apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation of the electrode  

Inventor :

Bardos, Ladislav ; Berg, Soren ; Barankova, Hana  

Agent name :

Collison & Co  

Address for service :

GPO Box 2556 ADELAIDE SA 5001  

Filing date :

12 October 1994  

Associated companies :

 

Applicant name :

Savcor Coatings Oy  

Applicant address :

Insinoorinkatu 8, 50100 Mikkeli, Finland  

Old name :

Barankova, Hana ; Bardos, Ladislav ; Berg, Soren ; Surfcoat Oy  

Original Source :

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