Details

Application number :
14409  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings  
Inventor :
Ross, Edward W ; Lacey, Christopher  
Agent name :
 
Address for service :
 
Filing date :
14 December 1994  
Associated companies :
 
Applicant name :
Phase Metrics  
Applicant address :
 
Old name :
 
Original Source :
Go  

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