Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
A Standard patent application filed on 14 December 1994 credited to Ross, Edward W ; Lacey, Christopher

Details

Application number :

14409  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings  

Inventor :

Ross, Edward W ; Lacey, Christopher  

Agent name :

 

Address for service :

 

Filing date :

14 December 1994  

Associated companies :

 

Applicant name :

Phase Metrics  

Applicant address :

 

Old name :

 

Original Source :

Go  

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