Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
A Standard patent application filed on 19 October 1992 credited to Lacey, Christopher
Details
Application number :
28958
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
Inventor :
Lacey, Christopher
Agent name :
Address for service :
Filing date :
19 October 1992
Associated companies :
Applicant name :
Phase Metrics
Applicant address :
3978 Sorrento Valley Blvd. San Diego CA 92121 United States Of America