Details
- Application number :
- 12406
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Cluster tool soft etch module and ECR plasma generator therefor
- Inventor :
- Ghanbari, Ebrahim
- Agent name :
-
- Address for service :
-
- Filing date :
- 21 January 1992
- Associated companies :
-
- Applicant name :
- Materials Research Corporation
- Applicant address :
-
- Old name :
-
- Original Source :
- Go