Semiconductor processing platform architecture having processing module isolation capabilities
A Standard patent application filed on 15 June 2000 credited to Bright, Nicolas J. ; Mooring, Benjamin W.

Details

Application number :
60517  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Semiconductor processing platform architecture having processing module isolation capabilities  
Inventor :
Bright, Nicolas J. ; Mooring, Benjamin W.  
Agent name :
 
Address for service :
 
Filing date :
15 June 2000  
Associated companies :
 
Applicant name :
Lam Research Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor