Dual-sided slot valve and method for implementing the same
A Standard patent application filed on 29 February 2000 credited to Kroeker, Tony R. ; Bright, Nicolas J. ; Mooring, Benjamin W.

Details

Application number :

36105  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Dual-sided slot valve and method for implementing the same  

Inventor :

Kroeker, Tony R. ; Bright, Nicolas J. ; Mooring, Benjamin W.  

Agent name :

 

Address for service :

 

Filing date :

29 February 2000  

Associated companies :

 

Applicant name :

Lam Research Corporation  

Applicant address :

 

Old name :

 

Original Source :

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