Electrostatic chuck using AC field excitation
A Standard patent application filed on 05 May 1988 credited to Boronkay, Stephen ; Horwitz, Christopher Max

Details

Application number :
17227  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Electrostatic chuck using AC field excitation  
Inventor :
Boronkay, Stephen ; Horwitz, Christopher Max  
Agent name :
 
Address for service :
 
Filing date :
05 May 1988  
Associated companies :
 
Applicant name :
Labtam Limited  
Applicant address :
 
Old name :
 
Original Source :
Go  

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