Multi-electrode vacuum processing chamber
A Standard patent application filed on 14 October 1988 credited to Horwitz, Christopher Max
;
Gross, Mark
;
Boronkay, Stephen
Details
Application number :
25524
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Multi-electrode vacuum processing chamber
Inventor :
Horwitz, Christopher Max
;
Gross, Mark
;
Boronkay, Stephen