Method of detecting the position of a chrome-on-glass reticle in an electron beam lithography apparatus
A Standard patent application filed on 24 August 1987 credited to Sliski, Alan Paul ; Shambroom, John Richard

Details

Application number :
77365  
Application type :
Standard  
Application status :
CEASED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method of detecting the position of a chrome-on-glass reticle in an electron beam lithography apparatus  
Inventor :
Sliski, Alan Paul ; Shambroom, John Richard  
Agent name :
Davies Collison Cave  
Address for service :
Level 15 1 Nicholson Street MELBOURNE VIC 3000  
Filing date :
24 August 1987  
Associated companies :
 
Applicant name :
Control Data Corporation  
Applicant address :
8100-34th Avenue South, Minneapolis, Minnesota, U.S.A.  
Old name :
 
Original Source :
Go  

Same Inventor