CAPACITANCE HEIGHT GAUGE AND RETICLE POSITION SENSOR FOR ELECTRON BEAM LITHOGRAPHY
A Standard patent application filed on 03 October 1984 credited to Sliski, Alan Paul ; Shambroom, John Richard

Details

Application number :
33788  
Application type :
Standard  
Application status :
CEASED  
Under opposition :
No  
Proceeding type :
 
Invention title :
CAPACITANCE HEIGHT GAUGE AND RETICLE POSITION SENSOR FOR ELECTRON BEAM LITHOGRAPHY  
Inventor :
Sliski, Alan Paul ; Shambroom, John Richard  
Agent name :
Davies Collison Cave  
Address for service :
Level 15 1 Nicholson Street MELBOURNE VIC 3000  
Filing date :
03 October 1984  
Associated companies :
 
Applicant name :
Control Data Corporation  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor