Substrate transfer chamber having a substrate holder vertically aligned with a substrate processing module

Application number :: 57368
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Substrate transfer chamber having a substrate holder vertically aligned with a substrate processing module
Inventor :: Hofmeister, Christopher A.
Agent name :
Address for service :
Filing date :: 14 June 2000
Associated companies :
Applicant name :: Brooks Automation, Inc.
Applicant address :
Old name :
Original Source :: Go

Substrate transfer chamber having a substrate holder vertically aligned with a substrate processing module A Standard patent application filed on 14 June 2000 credited to Hofmeister, Christopher A.