Substrate transport apparatus with multiple arms on a common axis of rotation
A Standard patent application filed on 23 November 1999 credited to Hofmeister, Christopher A.

Details

Application number :

18286  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Substrate transport apparatus with multiple arms on a common axis of rotation  

Inventor :

Hofmeister, Christopher A.  

Agent name :

 

Address for service :

 

Filing date :

23 November 1999  

Associated companies :

 

Applicant name :

Brooks Automation, Inc.  

Applicant address :

 

Old name :

 

Original Source :

Go  

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