Method for engraving a thin dielectric layer on a silicon substrate and equipment for carrying out said method
A Standard patent application filed on 06 June 2000 credited to Borsoni, Gilles ; Lazzari, Jean-Pierre ; Korwin-Pawlowski, Michael ; Froment, Michel

Details

Application number :
54119  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Method for engraving a thin dielectric layer on a silicon substrate and equipment for carrying out said method  
Inventor :
Borsoni, Gilles ; Lazzari, Jean-Pierre ; Korwin-Pawlowski, Michael ; Froment, Michel  
Agent name :
 
Address for service :
 
Filing date :
06 June 2000  
Associated companies :
 
Applicant name :
X-Ion  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor