Method for cleaning a silicon substrate surface and use for making integrated electronic components

Application number :: 44119
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method for cleaning a silicon substrate surface and use for making integrated electronic components
Inventor :: Korwin-Pawlowski, Michael ; Froment, Michel ; Borsoni, Gilles ; Lazzari, Jean-Pierre
Agent name :
Address for service :
Filing date :: 03 May 2000
Associated companies :
Applicant name :: X-Ion
Applicant address :
Old name :
Original Source :: Go

Method for cleaning a silicon substrate surface and use for making integrated electronic components A Standard patent application filed on 03 May 2000 credited to Korwin-Pawlowski, Michael ; Froment, Michel ; Borsoni, Gilles ; Lazzari, Jean-Pierre