Optical endpoint detection during chemical mechanical planarization
A Standard patent application filed on 10 May 2000 credited to Bibby, Thomas Frederick Allen Jr. ; Adams, John A.

Details

Application number :

49996  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Optical endpoint detection during chemical mechanical planarization  

Inventor :

Bibby, Thomas Frederick Allen Jr. ; Adams, John A.  

Agent name :

 

Address for service :

 

Filing date :

10 May 2000  

Associated companies :

 

Applicant name :

Speed-Fam-Ipec Corporation  

Applicant address :

 

Old name :

 

Original Source :

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