Apparatus and method for reducing charge accumulation on a substrate
A Standard patent application filed on 03 May 2000 credited to Chang, Tai-Hon P. ; Mankos, Marian

Details

Application number :
48603  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Apparatus and method for reducing charge accumulation on a substrate  
Inventor :
Chang, Tai-Hon P. ; Mankos, Marian  
Agent name :
 
Address for service :
 
Filing date :
03 May 2000  
Associated companies :
 
Applicant name :
ETEC Systems, Inc.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor