Array of multiple charged particle beamlet emitting columns
A Standard patent application filed on 31 August 2000 credited to Mankos, Marian ; Berglund, C. Neil ; Lee, Kim Y. ; Chang, Tai-Hon P.

Details

Application number :

19606  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Array of multiple charged particle beamlet emitting columns  

Inventor :

Mankos, Marian ; Berglund, C. Neil ; Lee, Kim Y. ; Chang, Tai-Hon P.  

Agent name :

 

Address for service :

 

Filing date :

31 August 2000  

Associated companies :

 

Applicant name :

ETEC Systems, Inc.  

Applicant address :

 

Old name :

 

Original Source :

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