An apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and method for use thereof
A Standard patent application filed on 07 November 1999 credited to Finarov, Moshe

Details

Application number :
10727  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
An apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and method for use thereof  
Inventor :
Finarov, Moshe  
Agent name :
 
Address for service :
 
Filing date :
07 November 1999  
Associated companies :
 
Applicant name :
Nova Measuring Instruments Ltd.  
Applicant address :
 
Old name :
 
Original Source :
Go  

Same Inventor