Method and apparatus for process control in the semiconductor manufacturing

Application number :: 2002321815
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method and apparatus for process control in the semiconductor manufacturing
Inventor :: Finarov, Moshe
Agent name :
Address for service :
Filing date :: 08 August 2002
Associated companies :
Applicant name :: NOVA MEASURING INSTRUMENTS LTD.
Applicant address :: Weizmann Science Park, P.O.B. 266, 76100 Rehovoth
Old name :
Original Source :: Go

Method and apparatus for process control in the semiconductor manufacturing A Standard patent application filed on 08 August 2002 credited to Finarov, Moshe