Details
- Application number :
- 2003297365
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- System and method for inspection using white light interferometry
- Inventor :
- Mathur, Sanjeev
- Agent name :
-
- Address for service :
-
- Filing date :
- 19 December 2003
- Associated companies :
-
- Applicant name :
- SEMICONDUCTOR TECHNOLOGIES AND INSTRUMENTS, INC.
- Applicant address :
- 2701 E. President George Bush Highway, Plano, TX 75074
- Old name :
-
- Original Source :
- Go
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