System and method for inspection using white light intererometry
A Standard patent application filed on 05 December 2001 credited to Mathur, Sanjeev
;
Chang, Chu-Yin
Details
Application number :
2002225629
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
System and method for inspection using white light intererometry
Inventor :
Mathur, Sanjeev
;
Chang, Chu-Yin
Agent name :
Address for service :
Filing date :
05 December 2001
Associated companies :
Applicant name :
SEMICONDUCTOR TECHNOLOGIES AND INSTRUMENTS, INC.
Applicant address :
2701 E. President George Bush Highway, Plano, TX 75074