A system and method for controlling plasma with an adjustable coupling to ground circuit
A Standard patent application filed on 17 December 2003 credited to Collison, Wenli ; Ni, Tuqiang

Details

Application number :
2003297165  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
A system and method for controlling plasma with an adjustable coupling to ground circuit  
Inventor :
Collison, Wenli ; Ni, Tuqiang  
Agent name :
 
Address for service :
 
Filing date :
17 December 2003  
Associated companies :
 
Applicant name :
LAM RESEARCH CORPORATION  
Applicant address :
P0862PCT, 4650 Cushing Parkway, Fremont, CA 94538  
Old name :
 
Original Source :
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Same Inventor