Details
- Application number :
- 36726
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Stage device and exposure device
- Inventor :
- Horikawa, Hiroto
;
Hara, Hideaki
- Agent name :
-
- Address for service :
-
- Filing date :
- 07 April 2000
- Associated companies :
-
- Applicant name :
- Nikon Corporation
- Applicant address :
-
- Old name :
-
- Original Source :
- Go