Abrasive article having a window system for polishing wafers, and methods
A Standard patent application filed on 11 April 2001 credited to Kim, Chong Yong
;
Pendergrass Jr., Daniel B.
;
Fizel, Jerry J.
;
Bruxvoort, Wesley J
;
Muilenburg, Michael J.
;
Webb, Richard J
;
Streifel, Robert J.
;
Gagliardi, John J
Details
Application number :
2001253382
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Abrasive article having a window system for polishing wafers, and methods
Inventor :
Kim, Chong Yong
;
Pendergrass Jr., Daniel B.
;
Fizel, Jerry J.
;
Bruxvoort, Wesley J
;
Muilenburg, Michael J.
;
Webb, Richard J
;
Streifel, Robert J.
;
Gagliardi, John J