Details
- Application number :
- 2003268618
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method and apparatus for processing substrates
- Inventor :
- Zuger, Othmar
- Agent name :
-
- Address for service :
-
- Filing date :
- 15 October 2003
- Associated companies :
-
- Applicant name :
- UNAXIS BALZERS AG
- Applicant address :
- FL-9496 Balzers
- Old name :
-
- Original Source :
- Go
Related Patents
Same Inventor