Radiation source module and cleaning apparatus therefor

Application number :: 10224
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Radiation source module and cleaning apparatus therefor
Inventor :: Pearcey, Richard ; Sheculski, Christopher Jeffery ; Hesse, Nicholas Helmut
Agent name :
Address for service :
Filing date :: 03 November 1999
Associated companies :
Applicant name :: Trojan Technologies Inc.
Applicant address :
Old name :
Original Source :: Go

Radiation source module and cleaning apparatus therefor A Standard patent application filed on 03 November 1999 credited to Pearcey, Richard ; Sheculski, Christopher Jeffery ; Hesse, Nicholas Helmut