Radiation source module and cleaning apparatus therefor

Application number :: 27893
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Radiation source module and cleaning apparatus therefor
Inventor :: Traubenberg, George ; Dall'armi, Vivian Francesca ; Bakker, Steven Mark
Agent name :
Address for service :
Filing date :: 25 February 2000
Associated companies :
Applicant name :: Trojan Technologies Inc.
Applicant address :
Old name :
Original Source :: Go

Radiation source module and cleaning apparatus therefor A Standard patent application filed on 25 February 2000 credited to Traubenberg, George ; Dall'armi, Vivian Francesca ; Bakker, Steven Mark