Diffractive optics, illumiinating optical system, exposure system and exposure method
A Standard patent application filed on 23 July 2003 credited to Kita, Naonori
;
Goto, Akihiro
Details
Application number :
2003252250
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Diffractive optics, illumiinating optical system, exposure system and exposure method
Inventor :
Kita, Naonori
;
Goto, Akihiro
Agent name :
Address for service :
Filing date :
23 July 2003
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331