Shearing interference measuring method and shearing interferometer, production method of projection optical system, projection optical system, and projection exposure system
A Standard patent application filed on 30 January 2003 credited to Liu, Zhigiang
Details
Application number :
2003244344
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Shearing interference measuring method and shearing interferometer, production method of projection optical system, projection optical system, and projection exposure system
Inventor :
Liu, Zhigiang
Agent name :
Address for service :
Filing date :
30 January 2003
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-Chome, Chiyoda-ku, Tokyo 100-8331