Shearing interferometer calibrating method, production method for projection optical system, projection opticalsystem, and projection exposure system
A Standard patent application filed on 07 July 2003 credited to Sugisaki, Katsumi
;
Liu, Zhigiang
;
Ota, Kazuya
Details
Application number :
2003281312
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Shearing interferometer calibrating method, production method for projection optical system, projection opticalsystem, and projection exposure system
Inventor :
Sugisaki, Katsumi
;
Liu, Zhigiang
;
Ota, Kazuya
Agent name :
Address for service :
Filing date :
07 July 2003
Associated companies :
Applicant name :
NIKON CORPORATION
Applicant address :
2-3, Marunouchi 3-Chome, Chiyoda-ku, Tokyo 100-8331