Optical integrator, illumination optical device, exposure apparatus, and exposure method
A Standard patent application filed on 17 June 2003 credited to Toyoda, Mitsunori

Details

Application number :

2003244222  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Optical integrator, illumination optical device, exposure apparatus, and exposure method  

Inventor :

Toyoda, Mitsunori  

Agent name :

 

Address for service :

 

Filing date :

17 June 2003  

Associated companies :

 

Applicant name :

NIKON CORPORATION  

Applicant address :

2-3, Marunouchi 3-chome, Chiyoda-ku, Tokyo 100-8331  

Old name :

 

Original Source :

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